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Scalar Differential Equation for Slowly-Varying Thickness-Shear Modes in AT-Cut Quartz Resonators with Surface Impedance for Acoustic Wave Sensor Application

机译:用于声波传感器应用的具有表面阻抗的aT切割石英谐振器中缓慢变化厚度剪切模式的标量微分方程

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摘要

For time-harmonic motions, we generalize a 2-D scalar differential equation derived previously by Tiersten for slowly-varying thickness-shear vibrations of AT-cut quartz resonators. The purpose of the generalization is to include the effects of surface acoustic impedance from, e.g., mass layers or fluids for sensor applications. In addition to the variation of fields along the plate thickness, which is considered in the usual 1-D acoustic wave sensor models, the equation obtained also describes in-plane variations of the fields, and therefore can be used to study the vibrations of finite plate sensors with edge effects. The equation is compared with the theory of piezoelectricity in the special cases of acoustic waves and pure thickness vibrations in unbounded plates. An example of a finite rectangular plate is also given.
机译:对于时谐运动,我们推广了Tiersten先前推导的二维标量微分方程,用于AT切石英谐振器的厚度-剪切振动的缓慢变化。归纳的目的是包括例如传感器应用的质量层或流体产生的表面声阻抗的影响。除了在通常的一维声波传感器模型中考虑的沿平板厚度的场变化之外,所获得的等式还描述了场的面内变化,因此可用于研究场的振动。带有边缘效应的平板传感器。在声波和无边界板的纯厚度振动的特殊情况下,将该方程与压电理论进行了比较。还给出了一个有限矩形板的示例。

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